| Institution: |
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| Department: | MiNaSys |
| Group: | Institut d'Electronique Fondamentale |
| Type of Institution: | University |
| Contact Person: | Alain Bosseboeuf (More info) |
| Country: | France |
| Main research areas: |
 Phonon-based devices
Technology and nanofabrication for phononic structures
Thermal measurements |
| Infrastructures |
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Tool: cryogénic probe station; Trade Name: JANIS + homemde accessories; Model: ; Installation Year: 2010;
Tool Specificities: Allow thermal measurements by 3 omega method and with or without applied mechanical stress by four point bending |
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Infrastructure: clean room (micro/nanofabrication and characterization); Area: 1000; Installation Year: 0;
Main tools available: lithograhy techniques (UV, DUV, e-beam, laser, soft UV NIL), dry (RIE, DRIE, IBE, XeF2, HF vapor) and wet etching, (Co)evaporation, (co)sputtering, PECVD,electroplating,wafer bonding, backend(wire bonding, flip-chip, CMP), Si & Ge epitaxy,microscopies (AFM, SEM,Optical DUV-Vis-NIR), electrical, optical and mechanical measurements, etc |
