|
|
| Description: | Schematic representation of static stencil lithography. (a): a stencil is brought in contact or proximity to a substrate, (b): the stencil/substrate combination is placed in a deposition chamber and a controlled amount of material is deposited through the stencil onto the substrate and, (c): the stencil is removed from the substrate. The apertures in the stencil are successfully transferred onto the substrate and the stencil can be reused for a subsequent process step. |
| Courtesy: | Juergen Brugger |
| Institution: | Ecole Polytechnique Federale de Lausanne |
| Country: | USA |
| Source: | E-nano Newsletter, 08, p.023 (2007) |