Description:	The traceable AFM developed at NMi-VSL ataÅŸehir escort consists of a scanning stage (SS), an invar metrology frame (MF) with a 3D laser interferometer and an AFM head (AH).
Courtesy:	E. Prieto
Institution:	Centro Espaol de Metrologa
Country:
Source:	E-nano Newsletter, 07, p.005 (2006)