Conferences & Courses
Special Interest Group Meeting: Micro/Nano Manufacturing. November 27-28, 2019. Technische Universitt Berlin (Germany) [27-11-2019]
Micro- and nano-scale manufacturing has been the subject of research and industrial focus over the past 20 years. Traditional lithography-based technology forms the basis of micro-electro-mechanical systems (MEMS) manufacturing, but also precision manufacturing technologies have been developed to cover micro-scale dimensions and accuracies.
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