(Top-left) Zoom-in of the optical cavity region showing the magnitude of the electric field (Top-right) Schematic displacement profile of the fundamental in-plane mechanical mode. (Bottom) SEM image of a typical optomechanical accelerometer. A test mass (green) is suspended on SiN nanotethers. On the upper edge of the test mass, a zipper photonic-crystal nanocavity (pink) is implemented
Source:
Alexander G. Krause, Martin Winger, Tim D. Blasius, Qiang Lin and Oskar Painter, A high-resolution microchip optomechanical accelerometer, Nature Photonics, 6, 768, 2012
