(Left) Schematic of static-mode surface-stress sensing MEMS device (Right) Suspended microchannel resonator (SMR). The fluid containing the target molecules flows through a channel inside the device and binds to the inner flow-channel walls, while the resonator oscillates in air or vacuum
Institution:
Euphonon
Source:
Jessica L. Arlett, E.B. Myers and Michael L. Roukes, Comparative advantages of mechanical biosensors, Nature Nanotechnology, 6, 203, 2011
